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1

Delta lithography method to increase CD uniformity and throughput of SLM-based maskless lithography

Manseung Seo, Haeryung Kim

Journal:

Microelectronic Engineering

Year:

2010

Language:

english

File:

PDF, 500 KB

english, 2010

2

[IEEE 2006 SICE-ICASE International Joint Conference - Busan Exhibition & Convention Center-BEXCO, Busan, Korea (2006.10.18-2006.10.21)] 2006 SICE-ICASE International Joint Conference - Contamination Control Strategy based on Particle Flow Behavior near Fast Moving Devices in Flat Panel Display Fabrication Cleanroom

Chio, Hyunsik, Cho, Hyuntae, Kim, Giljun, Kim, Haeryung, Seo, Manseung

Year:

2006

Language:

english

File:

PDF, 6.33 MB

english, 2006

3

Lithography upon micromirrors

Manseung Seo, Haeryung Kim

Journal:

Computer-Aided Design

Year:

2007

Language:

english

File:

PDF, 2.53 MB

english, 2007

4

[IEEE 2006 SICE-ICASE International Joint Conference - Busan Exhibition & Convention Center-BEXCO, Busan, Korea (2006.10.18-2006.10.21)] 2006 SICE-ICASE International Joint Conference - Proposal of Distributed Architecture for Micromirror Image Generation in Maskless Optolithography System

Choi, Jaeman, Jin, Younghun, Kim, Haeryung, Seo, Manseung

Year:

2006

Language:

english

File:

PDF, 5.16 MB

english, 2006

5

Hybrid layering scanning-projection micro-stereolithography for fabrication of conical microlens array and hollow microneedle array

Kim, Haeryung, Moon, Seung Ki, Seo, Manseung

Journal:

Microelectronic Engineering

Year:

2015

Language:

english

File:

PDF, 7.57 MB

english, 2015

6

Spatial light modulation based 3D lithography with single scan virtual layering

Manseung Seo, Haeryung Kim

Journal:

Microelectronic Engineering

Year:

2011

Language:

english

File:

PDF, 687 KB

english, 2011

7

Imaging-histologic discordance at sonographically guided percutaneous biopsy of breast lesions

Min Jung Kim, Eun-Kyung Kim, Sun Young Park, Hae Kyoung Jung, Byeong-Woo Park, Haeryung Kim, Ki Keun Oh

Journal:

European Journal of Radiology

Year:

2008

Language:

english

File:

PDF, 474 KB

english, 2008

8

Endocytosis of EphA receptors is essential for the proper development of the retinocollicular topographic map

Yoo, Sooyeon, Kim, Yujin, Noh, Hyuna, Lee, Haeryung, Park, Eunjeong, Park, Soochul

Journal:

The EMBO Journal

Year:

2011

Language:

english

File:

PDF, 2.42 MB

english, 2011

9

A gene trap knockout of the Tiam-1 protein results in malformation of the early embryonic brain

Sooyeon Yoo, Yujin Kim, Haeryung Lee, Sungjeong Park, Soochul Park

Journal:

Molecules and Cells

Year:

2012

Language:

english

File:

PDF, 1.68 MB

english, 2012

10

Influence of dynamic sub-pixelation on exposure intensity distribution under diffraction effects in spatial light modulation based lithography

Seo, Manseung, Kim, Haeryung

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 978 KB

english, 2012

11

EphrinA5-EphA7 complex induces apoptotic cell deathviaTNFR1

Haeryung Lee,Eunjeong Park,Yujin Kim,Soochul Park

Journal:

Molecules and Cells

Year:

2013

Language:

english

File:

PDF, 1.02 MB

english, 2013

12

Systematic Approach to Contour-Parallel Tool Path Generation of 2.5-D Pocket with Islands

Seo, Manseung, Kim, Haeryung, Onosato, Masahiko

Journal:

Computer-Aided Design and Applications

Year:

2005

Language:

english

File:

PDF, 447 KB

english, 2005

13

Favorable Design Parameter to Control Contamination Associated in FPD Fabrication Cleanrooms

Seo, Manseung, Kim, Giljun, Kim, Haeryung

Journal:

Computer-Aided Design and Applications

Year:

2005

Language:

english

File:

PDF, 390 KB

english, 2005

14

[IEEE 2006 SICE-ICASE International Joint Conference - Busan Exhibition & Convention Center-BEXCO, Busan, Korea (2006.10.18-2006.10.21)] 2006 SICE-ICASE International Joint Conference - Micromirror based Lithography Simulation System based on Overlay Intensity Basis

Park, Kiwon, Choi, Jaeman, Kim, Haeryung, Seo, Manseung

Year:

2006

Language:

english

File:

PDF, 6.93 MB

english, 2006

15

[IEEE 2006 SICE-ICASE International Joint Conference - Busan Exhibition & Convention Center-BEXCO, Busan, Korea (2006.10.18-2006.10.21)] 2006 SICE-ICASE International Joint Conference - Lithographic Data Generation Algorithm based on Micromirror Cell Decomposition

Jin, Younghun, Park, Kiwon, Kim, Haeryung, Seo, Manseung

Year:

2006

Language:

english

File:

PDF, 5.18 MB

english, 2006

16

Proxy delta lithography method: Improving pattern fidelity and exposure dose effectiveness of spatial light modulation based lithography

Kim, Haeryung, Seo, Manseung

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 1.12 MB

english, 2014

17

SPIE Proceedings [SPIE Photonics Asia - Beijing, China (Monday 5 November 2012)] Optical Design and Testing V - Parameters affecting pattern fidelity and line edge roughness under diffraction effects in optical maskless lithography using a digital micromirror device

Seo, Manseung, Lee, Taehyoung, Kim, Haeryung, Wang, Yongtian, Du, Chunlei, Hua, Hong, Tatsuno, Kimio, Urbach, H. Paul

Year:

2012

Language:

english

File:

PDF, 1.19 MB

english, 2012

18

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 24 February 2013)] Optical Microlithography XXVI - Adjustment of image decomposition mode and reflection criterion focusing on critical dimension uniformity and exposure dose effectiveness under diffraction effects in optical microlithography using a digital micromirror device

Seo, Manseung, Conley, Will, Kim, Haeryung

Year:

2013

Language:

english

File:

PDF, 2.35 MB

english, 2013

19

Extension of Pocket Machining to Direct Write Lithography

Seo, Manseung, Kim, Haeryung

Journal:

Computer-Aided Design and Applications

Year:

2006

Language:

english

File:

PDF, 905 KB

english, 2006

20

Maskless Lithographic Pattern Generation System upon Micromirrors

Seo, Manseung, Kim, Haeryung, Park, Myungjoo

Journal:

Computer-Aided Design and Applications

Year:

2006

Language:

english

File:

PDF, 716 KB

english, 2006

21

Modelling spatial climate change landuse adaptation with multi-objective genetic algorithms to improve resilience for rice yield and species richness and to mitigate disaster risk

Yoon, Eun Joo, Thorne, James H, Park, Chan, Lee, Dong Kun, Kim, Kwang Soo, Yoon, Heeyeun, Seo, Changwan, Lim, Chul-Hee, Kim, Haeryung, Song, Young-Il

Journal:

Environmental Research Letters

Year:

2018

Language:

english

File:

PDF, 1.78 MB

english, 2018

22

Pâ197: LateâNewsâPoster: Visual Advantages of Curved Displays for Working Efficiency

Park, Daeun, Seo, Wonyoung, Cho, JaeEun, Hong, HaeRyung, Kim, YoonJung, Park, YungKyung

Journal:

SID Symposium Digest of Technical Papers

Year:

2020

File:

PDF, 774 KB

2020

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